# Advancements in 2D semiconductor material integration > Live situation record from CLSTR: https://clstr.news/situations/advancements-in-2d-semiconductor-material-integration > Updated: 2026-09-10T05:28:00.000Z. Sources: 4. Developments: 2. Research in semiconductor technology has focused on improving the performance and integration of two-dimensional (2D) materials. Initially, researchers at UNIST developed a manufacturing process to protect molybdenum disulfide (MoS2) from photoresist residue and plasma contamination during lithography. By using a 5-nanometer sacrificial gold film as a barrier, the team achieved a tenfold increase in on-current and significantly reduced contact resistance in transistors. Subsequent developments have addressed the integration of 2D metal oxides with silicon technology. Using a van der Waals epitaxy approach, scientists successfully grew large-scale, single-crystalline films of transition metal monoxides, such as cobalt, iron, nickel, and manganese oxides, which are compatible with conventional chips. Additionally, new CMOS-compatible nanomechanical resonators using hafnium–zirconium oxide and silicon dioxide have been introduced to provide high-frequency stability and energy efficiency as an alternative to quartz resonators. ## Timeline ### 2026-09-10: Researchers advance silicon integration of 2D metal oxides and CMOS resonators Researchers have achieved breakthroughs in semiconductor technology, including growing single-crystalline 2D metal oxide films on silicon and developing temperature-stable CMOS-compatible resonators. 2 sources. https://clstr.news/cluster/researchers-advance-silicon-integration-of-2d-metal-oxides-and-cmos-resonators ### 2026-08-23: UNIST researchers develop process to boost 2D semiconductor performance UNIST researchers developed a process using a 5nm sacrificial metal film to prevent residue contamination in 2D semiconductors, increasing transistor current performance by tenfold. 2 sources. https://clstr.news/cluster/unist-researchers-develop-process-to-boost-2d-semiconductor-performance --- Cite as: Advancements in 2D semiconductor material integration. CLSTR, https://clstr.news/situations/advancements-in-2d-semiconductor-material-integration