# Rigaku and Tohoku University X-ray metrology collaboration > Live situation record from CLSTR: https://clstr.news/situations/rigaku-and-tohoku-university-x-ray-metrology-collaboration > Updated: 2026-08-31T12:16:34.000Z. Sources: 6. Developments: 2. Rigaku Corporation and Tohoku University have established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology, named ‘Beyond The Limits’, in Sendai, Japan. This three-year initiative aims to advance X-ray measurement technologies, specifically soft X-ray methods, to address the increasing complexity of semiconductor manufacturing and microstructure analysis. The institute will utilize Tohoku University’s NanoTerasu synchrotron radiation facility and integrate information science with technical X-ray expertise. Alongside this research partnership, Rigaku has launched the CT Lab HR160, a high-resolution X-ray computed tomography system developed with Excillum AB. This system uses a NanoTube N3 X-ray source to provide non-destructive 3D imaging for analyzing batteries, semiconductor devices, and power electronics. ## Timeline ### 2026-08-31: Rigaku advances X-ray metrology through new research institute and high-resolution CT system Rigaku Corporation is advancing X-ray metrology through a new research institute with Tohoku University and the launch of the CT Lab HR160 high-resolution tomography system for semiconductor and battery testing 4 sources. https://clstr.news/cluster/rigaku-advances-x-ray-metrology-through-new-research-institute-and-high-resolution-ct-system ### 2026-08-27: Rigaku and Tohoku University launch X-ray metrology research institute Rigaku and Tohoku University have launched a joint research institute in Japan to develop advanced X-ray metrology techniques for inspecting complex, multi-layered semiconductor structures. 2 sources. https://clstr.news/cluster/rigaku-and-tohoku-university-launch-x-ray-metrology-research-institute-1 --- Cite as: Rigaku and Tohoku University X-ray metrology collaboration. CLSTR, https://clstr.news/situations/rigaku-and-tohoku-university-x-ray-metrology-collaboration