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[TECHNOLOGY] · China, Netherlands · 41 sources

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Shanghai Aishengna Electronic Technology Group begins mass production of DUV lithography tools

China has started mass production of domestically developed immersion deep‑ultraviolet (DUV) lithography machines. The effort is led by the state‑backed Shanghai Aishengna Electronic Technology Group, which plans to assemble about five units in 2026 and roughly twenty by 2027. The first machines are slated for delivery to China’s major chipmakers – Semiconductor Manufacturing International Corp (SMIC), Hua Hong Semiconductor and ChangXin Memory Technologies (CXMT).

The announcement sent ASML Holding’s shares down about 8‑10%, wiping more than €60 billion from its market value, but analysts say the immediate commercial threat is limited because ASML still dominates the extreme‑ultraviolet (EUV) market and ships far larger volumes of DUV equipment (over 130 units in 2025). The Chinese tools are reported to lag behind ASML in performance and reliability, and while most components are domestic, critical parts still come from Japan.

The development underscores Beijing’s drive for semiconductor self‑sufficiency amid U.S. export controls, and it is being watched as a long‑term risk to ASML’s China revenue.

Entities

ASML Holding · ASML Holding N.V. · ASML Holding NV · ChangXin Memory Technologies · ChangXin Memory Technologies (CXMT) · China · Hua Hong Semiconductor · People's Republic of China · SMIC · Semiconductor Manufacturing International Corp · Semiconductor Manufacturing International Corp (SMIC) · Shanghai Aishengna Electronic Technology Group

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