Ebara Corporation begins shipping cryogenic chillers for semiconductor industry

Ebara Corporation has announced the development and initial shipment of the RJ-TTC model, a cryogenic chiller designed for the semiconductor industry capable of reaching temperatures as low as -60°C.

As semiconductor devices become increasingly miniaturized and highly integrated, the etching process requires higher precision, lower temperatures, and higher output. These advancements typically lead to increased power and water consumption in cooling equipment. To address this, Ebara integrated its specialized cooling and pump technologies to create a more efficient system.

The new chiller features a newly developed small energy-saving pump for coolant circulation and utilizes a proprietary energy-saving algorithm that optimizes control in real-time based on the load. These innovations allow the RJ-TTC model to reduce both electricity and water consumption by approximately 30% to 50% compared to conventional products.