KOREATECH introduces atomic-level electron microscope for semiconductor analysis

Korea University of Technology and Education (KOREATECH) has introduced a high-precision 300kV aberration-corrected transmission electron microscope (Double Cs-TEM) to enhance the analysis of semiconductors, displays, and next-generation materials. The equipment, manufactured by Thermo Fisher Scientific, allows for observation at the atomic level and includes an energy-dispersive X-ray spectrometer (EDS) for precise component analysis and defect identification.

The implementation is part of an industrial innovation infrastructure project supported by the Ministry of Trade, Industry and Energy. Out of a total project budget of 9.4 billion KRW, approximately 4.5 billion KRW was allocated for this specific equipment.

KOREATECH plans to integrate the new microscope with existing Focused Ion Beam (FIB) equipment to create a ‘one-stop’ sample preprocessing and ultra-precision analysis process. This system is intended to support research and industrial needs by providing rapid, accurate analysis for materials including metals, bio-materials, energy, and chemicals.