Rigaku advances X-ray metrology through new research institute and high-resolution CT system

Rigaku Corporation is expanding its X-ray technology capabilities through new research collaborations and product launches. The company and Tohoku University have established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology. Scheduled to launch on August 1, 2026, this three-year initiative aims to advance soft X-ray measurement technology to overcome current limitations in semiconductor microstructure analysis. The institute will utilize Tohoku University’s NanoTerasu synchrotron radiation facility and focus on integrating information science with technical X-ray expertise.

In a separate development, Rigaku has launched the CT Lab HR160, a high-resolution X-ray computed tomography system developed in collaboration with Excillum AB. The system utilizes Excillum’s NanoTube N3 X-ray source and is designed for the non-destructive 3D imaging of fine internal structures. It is intended for use in analyzing batteries, semiconductor devices, multilayer ceramic capacitors, and power electronics, achieving a spatial resolution of 250 nm.