Rigaku and Tohoku University launch X-ray metrology research institute

Rigaku Corporation and Tohoku University have established the Rigaku Tohoku University Co-Creation Research Institute for X-ray Metrology: Beyond The Limits. Launched on August 1, 2026, the institute aims to advance X-ray metrology technology, develop new measurement methods, and train a new generation of researchers.

The collaboration focuses on addressing the increasing complexity of semiconductor manufacturing. As chips become smaller and incorporate more layers and diverse materials, conventional metrology techniques are reaching their limits in evaluating microstructures and performing precise structural analysis.

To overcome these challenges, the institute will explore new technologies, including soft X-rays and advanced resources developed in collaboration with synchrotron radiation facilities, such as the NanoTerasu facility located at Tohoku University. The initial partnership is set for three years, with the possibility of extension based on research outcomes.