Rigaku and Tohoku University launch X-ray metrology research institute

Rigaku and Tohoku University have established the Rigaku-Tohoku University Co-Creation Research Institute for X-ray Metrology, named ‘Beyond The Limits’, in Sendai, Japan. The partnership aims to advance X-ray measurement technologies to address the increasing complexity of semiconductor manufacturing.

As chip architectures become denser with more layers and diverse materials, conventional X-ray techniques struggle to resolve tiny structures or inspect buried layers without damaging the device. The institute will focus on developing new methods, including the use of soft X-rays, which possess lower energy and longer wavelengths.

Tohoku University will provide access to NanoTerasu, its next-generation synchrotron radiation facility, alongside expertise in information science to handle complex datasets. Rigaku will contribute its experience in developing X-ray analytical systems and metrology technologies. The initial three-year collaboration will prioritize semiconductor applications, specifically microstructure measurement and advanced data interpretation, with plans to expand into electronic and functional materials.